產品
晶圓
適用於 12 吋與 8 吋晶圓廠製程的矽（Si）、碳化矽（SiC）及特殊晶圓。
| Property | Specification |
|---|---|
| Material | Si, SiC |
| Diameter | 300mm (12-inch) / 200mm (8-inch) |
| Thickness | 725 ± 15 μm |
| Resistivity | 1–100 Ω·cm |
| Crystal Orientation | <100>, <111> |
適用於 12 吋與 8 吋晶圓廠製程的矽（Si）、碳化矽（SiC）及特殊晶圓。
| Property | Specification |
|---|---|
| Material | Si, SiC |
| Diameter | 300mm (12-inch) / 200mm (8-inch) |
| Thickness | 725 ± 15 μm |
| Resistivity | 1–100 Ω·cm |
| Crystal Orientation | <100>, <111> |