產品
濺鍍靶材
具備 GDMS 與 UT 品質數據的 Cu、Al、Ag 高純度靶材。
| Property | Specification |
|---|---|
| Material | Cu, Al, Ag, Ti, Ta, W |
| Purity | 99.99% – 99.9999% (4N–6N) |
| Dimensions | Custom (up to Ø550mm) |
| Density | ≥99.5% theoretical |
| GDMS Available | Yes — full trace analysis |
具備 GDMS 與 UT 品質數據的 Cu、Al、Ag 高純度靶材。
| Property | Specification |
|---|---|
| Material | Cu, Al, Ag, Ti, Ta, W |
| Purity | 99.99% – 99.9999% (4N–6N) |
| Dimensions | Custom (up to Ø550mm) |
| Density | ≥99.5% theoretical |
| GDMS Available | Yes — full trace analysis |