產品
特殊氣體
半導體晶圓廠用高純度製程氣體與載氣。
| Property | Specification |
|---|---|
| Gas Type | NF₃, SF₆, SiH₄, NH₃, N₂O |
| Purity | 99.999% – 99.9999% (5N–6N) |
| Packaging | Cylinder / Tube Trailer |
| Delivery | On-demand / VMI |
半導體晶圓廠用高純度製程氣體與載氣。
| Property | Specification |
|---|---|
| Gas Type | NF₃, SF₆, SiH₄, NH₃, N₂O |
| Purity | 99.999% – 99.9999% (5N–6N) |
| Packaging | Cylinder / Tube Trailer |
| Delivery | On-demand / VMI |