产品
晶圆
适用于12英寸和8英寸晶圆厂工艺的Si、SiC及特种晶圆。
| Property | Specification |
|---|---|
| Material | Si, SiC |
| Diameter | 300mm (12-inch) / 200mm (8-inch) |
| Thickness | 725 ± 15 μm |
| Resistivity | 1–100 Ω·cm |
| Crystal Orientation | <100>, <111> |
适用于12英寸和8英寸晶圆厂工艺的Si、SiC及特种晶圆。
| Property | Specification |
|---|---|
| Material | Si, SiC |
| Diameter | 300mm (12-inch) / 200mm (8-inch) |
| Thickness | 725 ± 15 μm |
| Resistivity | 1–100 Ω·cm |
| Crystal Orientation | <100>, <111> |