Nami Tech Solutions

CVD Silicon Carbide Discs & Plates

Silicon carbide grown by chemical vapour deposition and separated from its substrate — freestanding material, not a coating. CVD is the route that reaches the purity a semiconductor process chamber demands, which is why susceptors, focus rings and plates are specified in it rather than in sintered SiC. We supply it at three stages of completion: an evaluation coupon, a blank for in-house machining, and parts finished to drawing. The service here is the paperwork as much as the material — purity, resistivity and flatness mean nothing without the measurement conditions, so inspection items and their measurement points are fixed in a written, signed document before the order, and incoming inspection argues with that sheet.

The three supply stages: a Φ100 evaluation coupon (NTS-CVDSIC-T), a Φ300–335 mm blank at 7–14 mm thickness for in-house machining (NTS-CVDSIC-B), and a part ground and lapped to drawing (NTS-CVDSIC-M).

Inspection items and their measurement conditions are fixed in writing before the order — qualifying on the small coupon costs a fraction of finding a mismatch on a full-size blank.

Grades

SKU Grade Typical Application
NTS-CVDSIC-T Test coupon (Φ100) High-purity CVD-SiC, thickness agreed Evaluation and qualification
NTS-CVDSIC-B Blank Φ300–335 mm class, thickness 7–14 mm agreed Buyers with in-house machining
NTS-CVDSIC-M Machined part Ground and lapped to drawing Finished-component procurement

NTS-CVDSIC-T — evaluation coupon

A Φ100 disc of the production material, thickness agreed, for qualification before committing to full-size blanks or parts. Run your own measurements on it and use the results to write the inspection document for the production order.

NTS-CVDSIC-B — machining blank

Freestanding CVD-SiC in the Φ300–335 mm class, thickness 7–14 mm by agreement, supplied as material for buyers who hold their own grinding and lapping. The written inspection agreement covers the material properties; geometry control and the drawing stay yours.

NTS-CVDSIC-M — machined to drawing

The full route: blank production, then grinding and lapping against your drawing, delivered as a finished component. Dimensional and surface criteria join the material criteria on one agreed inspection sheet.

Typical properties — subject to confirmation per lot. COA provided with every shipment.

Request datasheet / quote

Not sure which grade fits? Tell us your application — we will reply within 24 hours.

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