製品
スパッタリングターゲット
GDMS・UT品質データを備えたCu、Al、Ag高純度ターゲット。
| Property | Specification |
|---|---|
| Material | Cu, Al, Ag, Ti, Ta, W |
| Purity | 99.99% – 99.9999% (4N–6N) |
| Dimensions | Custom (up to Ø550mm) |
| Density | ≥99.5% theoretical |
| GDMS Available | Yes — full trace analysis |
GDMS・UT品質データを備えたCu、Al、Ag高純度ターゲット。
| Property | Specification |
|---|---|
| Material | Cu, Al, Ag, Ti, Ta, W |
| Purity | 99.99% – 99.9999% (4N–6N) |
| Dimensions | Custom (up to Ø550mm) |
| Density | ≥99.5% theoretical |
| GDMS Available | Yes — full trace analysis |