製品
ファブ装置部品
PMメンテナンス用のポンプ、バルブ、継手、Oリング。
| Property | Specification |
|---|---|
| Type | Pumps, Valves, Fittings, O-rings |
| Material | SUS316L, PTFE, FKM, Hastelloy |
| Compatibility | AMAT, LAM, TEL, ASML |
| Lead Time | 2–4 weeks (stock) / 8–12 weeks (MTO) |
PMメンテナンス用のポンプ、バルブ、継手、Oリング。
| Property | Specification |
|---|---|
| Type | Pumps, Valves, Fittings, O-rings |
| Material | SUS316L, PTFE, FKM, Hastelloy |
| Compatibility | AMAT, LAM, TEL, ASML |
| Lead Time | 2–4 weeks (stock) / 8–12 weeks (MTO) |